Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems
Research output: Contribution to journal › Journal article › Research › peer-review
Udgivelsesdato: May 15
| Original language | English |
|---|---|
| Journal | Optics Letters |
| Volume | 26 |
| Issue number | 10 |
| Pages (from-to) | 716-718 |
| ISSN | 0146-9592 |
| DOIs | |
| Publication status | Published - 2001 |
| Externally published | Yes |
ID: 13389898